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Refined by: journal title: Applied mechanics and materials remove creation date: After 2016 remove author: Li, Z. L. remove
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Self-Calibration of Coupling Error for 3-DOF Displacement Measurement of Planar Working Stage Based on Two Planar Gratings

Liu, Y. M. et al.

Applied mechanics and materials -- Trans Tech Publications Ltd. -- Volume: 870 Issue:; (pages 135-140) -- 2017

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by this Author/Contributor:

  1. Du, D. H.
  2. Liu, Y. M.
  3. Huang, J. Z.
  4. Yuan, M. Q.
  5. Tan, J. B.

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