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Thermal expansion and internal quality of a proposed EUVL mask substrate material: Zerodur [4452-12]

Davis, M. J. Marker, A. J. Aschke, L. Schubert, F. Moersen, E.; Kohlmann, H. Mitra, I. Alkemper, J. Muller, R. W. Taylor, J. S.; Davis, M. J.

Proceedings of SPIE, the International Society for Optical Engineering.; Inorganic optical materials; San Diego, CA, 2001; Aug, 2001, 100-106 -- SPIE; 2001 (pages 100-106) -- 2001

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Comparative study of the UV-optical and structural properties of SiO~2, Al~2O~3, and HfO~2 single layers deposited by reactive evaporation, ion-assisted deposition, and plasma-ion-assisted deposition [4102-38]

Thielsch, R. Gatto, A. Heber, J. Martin, S. Kaiser, N.; Arthurs, E. G.

Proceedings of SPIE, the International Society for Optical Engineering.; Inorganic optical materials; San Diego, CA, 2000; Aug, 1998, 276-288 -- SPIE; 2000 (pages 276-288) -- 1998

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Dehydroxylation of phosphate laser glass [4102-25]

Thorsness, C. B. Suratwala, T. I. Steele, R. A. Campbell, J. H.; Hayden, J. S. Pucilowski, S. A. Suzuki, K.; Arthurs, E. G.

Proceedings of SPIE, the International Society for Optical Engineering.; Inorganic optical materials; San Diego, CA, 2000; Aug, 1998, 175-194 -- SPIE; 2000 (pages 175-194) -- 1998

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Large-area flat and curved sapphire window blanks [4102-06]

Pazol, B. G. McGuire, P. T. Gentilman, R. L. Locher, J. W.; Askinazi, J.; Arthurs, E. G.

Proceedings of SPIE, the International Society for Optical Engineering.; Inorganic optical materials; San Diego, CA, 2000; Aug, 1998, 52-58 -- SPIE; 2000 (pages 52-58) -- 1998

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Spectroscopic characterization of Nd^3^+ doped barium fluoroborophosphate and fluorosulphatephosphate glasses [4452-05]

De la Rosa-Cruz, E. Kumar, G. A. Diaz-Torres, L. A. Martinez, A.; Barbosa-Garcia, O.; Davis, M. J.

Proceedings of SPIE, the International Society for Optical Engineering.; Inorganic optical materials; San Diego, CA, 2001; Aug, 2001, 31-38 -- SPIE; 2001 (pages 31-38) -- 2001

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Optical and surface properties of oxyfluoride glass [4102-16]

Nee, S.-M. F. Johnson, L. F. Moran, M. B. Pentony, J. M.; Daigneault, S. M. Tran, D. C. Billman, K. W. Siahatgar, S.; Arthurs, E. G.

Proceedings of SPIE, the International Society for Optical Engineering.; Inorganic optical materials; San Diego, CA, 2000; Aug, 1998, 122-133 -- SPIE; 2000 (pages 122-133) -- 1998

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Vacuum ultraviolet transmission of aluminum fluoroberyllate glasses [4102-44]

Fujino, S. Muller, M. Morinaga, K.; Arthurs, E. G.

Proceedings of SPIE, the International Society for Optical Engineering.; Inorganic optical materials; San Diego, CA, 2000; Aug, 1998, 324-331 -- SPIE; 2000 (pages 324-331) -- 1998

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UV imprinting of surface grating in hybrid sol-gel glasses by holography technique [4102-31]

Jiang, H. Yuan, X. Zhou, Y. Gunawan, O. Chan, Y.-C. Lam, Y.-L.; Arthurs, E. G.

Proceedings of SPIE, the International Society for Optical Engineering.; Inorganic optical materials; San Diego, CA, 2000; Aug, 1998, 234-241 -- SPIE; 2000 (pages 234-241) -- 1998

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Fabrication of large thick panels of transparent spinel [4452-15]

Patterson, M. Gilde, G. A. Roy, D. W.; Davis, M. J.

Proceedings of SPIE, the International Society for Optical Engineering.; Inorganic optical materials; San Diego, CA, 2001; Aug, 2001, 126-132 -- SPIE; 2001 (pages 126-132) -- 2001

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10
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Long-term test and characterization of optical components at 193 nm and 157 nm [4102-35]

Vogler, K. Klaft, I. Schroder, T. Stamm, U. Mann, K. R. Apel, O.; Gorling, C. Leinhos, U.; Arthurs, E. G.

Proceedings of SPIE, the International Society for Optical Engineering.; Inorganic optical materials; San Diego, CA, 2000; Aug, 1998, 255-260 -- SPIE; 2000 (pages 255-260) -- 1998

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