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Development of chemically assisted dry etching methods for magnetic device structures

Jung, K. B. Cho, H. Lee, K. P. Marburger, J. Sharifi, F. Singh, R. K. Kumar, D. Dahmen, K. H. Pearton, S. J.; Wolfe, J.

Journal of vacuum science & technology. B, Microelectronics and nanometer structures; Electron, ion, and photon beam technology and nanofabrication; Marco Island, FL, 1999; Jun, 1999, 3186-3189 -- American Institute of Physics; 1999 (pages 3186-3189) -- 1999

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  1. Jung, K. B. Cho, H. Lee, K. P. Marburger, J. Sharifi, F. Singh, R. K. Kumar, D. Dahmen, K. H. Pearton, S. J.
  2. Wolfe, J.

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