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Nanoimprint lithography for semiconductor devices and future patterning innovation (Keynote Paper) [7970-02]

Higashiki, T.|Nakasugi, T.|Yoneda, I.

Bellingham, Wash.; SPIE; c2011 -- Volume: 7970 -- 2011

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2
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Model-based mask data preparation (MB-MDP) and its impact on resist heating [7970-37]

Fujimura, A.|Kamikubo, T.|Bork, I.

Bellingham, Wash.; SPIE; c2011 -- Volume: 7970 -- 2011

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3
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Optimization of e-beam landing energy for EBDW [7970-63]

Liu, E.D.|Prescop, T.

Bellingham, Wash.; SPIE; c2011 -- Volume: 7970 -- 2011

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4
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Evaluation of maskless electron beam direct writing with double character projection apertures [7637-12]

Midoh, Y.; Terasaka, T.; Nakamae, K.

Proceedings of SPIE, the International Society for Optical Engineering.; Alternative lithographic technologies; San Jose, CA, 2010; Feb, 2010, 7637 0D -- Bellingham, Wash.; SPIE; c2010 -- 2010

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5
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Fast mask writers: technology options and considerations (Invited Paper) [7970-32]

Litt, L.C.|Groves, T.|Hughes, G.

Bellingham, Wash.; SPIE; c2011 -- Volume: 7970 -- 2011

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6
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A new releasing material and continuous nano-imprinting in mold replication for patterned media [7970-29]

Suzuki, K.|Kobayashi, H.|Sato, T.|Yamashita, H.|Watanabe, T.

Bellingham, Wash.; SPIE; c2011 -- Volume: 7970 -- 2011

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7
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Heating device for 96-well microtiter culture plates [7902-61]

Bruns, T.|Berchtold, C.|Schneckenburger, H.

Bellingham; SPIE; c2011 -- Volume: 7902 -- 2011

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8
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Reactive fluorinated surfactant for step and flash imprint lithography [7970-28]

Ogawa, T.|Hellebusch, D.J.|Lin, M.W.|Jacobsson, B.M.|Bell, W.|Willson, C.G.

Bellingham, Wash.; SPIE; c2011 -- Volume: 7970 -- 2011

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9
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Photosensitive porous low-k interlayer dielectric film [5592-32]

Kuroki, S.-I.; Kikkawa, T.

Proceedings of SPIE, the International Society for Optical Engineering.; Nanofabrication: technologies, devices and applications /; Philadelphia, PA, 2004; Oct, 2005, 170-174 -- SPIE; 2005 (pages 170-174) -- 2005

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10
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Controlled nanoparticle arrays for transparent SERS/optical trapping substrates [5592-13]

Wickenden, A. E.; Alexander, T. A.

Proceedings of SPIE, the International Society for Optical Engineering.; Nanofabrication: technologies, devices and applications /; Philadelphia, PA, 2004; Oct, 2005, 63-70 -- SPIE; 2005 (pages 63-70) -- 2005

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