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Thermal flow sensor for liquids and gases based on combinations of two principles

Ashauer, M. et al.

Sensors and actuators. A, Physical. VOL 73; NUMBER 1/2, ; 1999, 7-13 -- ELSEVIER SEQUOIA S A (pages 7-13) -- 1999

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Anisotropic etching of germanium

Leancu, R. et al.

Sensors and actuators. A, Physical. VOL 46; NUMBER 1/3, ; 1995, 35 -- ELSEVIER SEQUOIA S A Part: Part 1/3; -- 1995

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Silicon nitride membrane sensors with monocrystalline transducers

Folkmer, B. et al.

Sensors and actuators. A, Physical. VOL 51; NUMBER 1, ; 1995, 71-75 -- ELSEVIER SEQUOIA S A Part: Part 1; (pages 71-75) -- 1995

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A novel method to avoid sticking of surface-micromachined structures

Kozlowski, F. et al.

Sensors and actuators. A, Physical. VOL 54; NUMBER 1//3, ; 1996, 659-662 -- ELSEVIER SEQUOIA S A Part: Part 1//3; (pages 659-662) -- 1996

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Porous silicon: a novel material for microsystems

Lang, W. et al.

Sensors and actuators. A, Physical. VOL 51; NUMBER 1, ; 1995, 31-36 -- ELSEVIER SEQUOIA S A Part: Part 1; (pages 31-36) -- 1995

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Anisotropic etching for optical gratings

Klumpp, A. et al.

Sensors and actuators. A, Physical. VOL 51; NUMBER 1, ; 1995, 77-80 -- ELSEVIER SEQUOIA S A Part: Part 1; (pages 77-80) -- 1995

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6 results  for Everything in this catalogue

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by this Author/Contributor:

  1. Lang, W
  2. De Rooij
  3. Moret, J.-M.
  4. Steiner, P.
  5. Sandmaier, H.

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