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Refined by: publisher: Bellingham, Wash.; SPIE remove
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Nanoimprint lithography for semiconductor devices and future patterning innovation (Keynote Paper) [7970-02]

Higashiki, T.|Nakasugi, T.|Yoneda, I.

Bellingham, Wash.; SPIE; c2011 -- Volume: 7970 -- 2011

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2
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Optimization of e-beam landing energy for EBDW [7970-63]

Liu, E.D.|Prescop, T.

Bellingham, Wash.; SPIE; c2011 -- Volume: 7970 -- 2011

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3
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Model-based mask data preparation (MB-MDP) and its impact on resist heating [7970-37]

Fujimura, A.|Kamikubo, T.|Bork, I.

Bellingham, Wash.; SPIE; c2011 -- Volume: 7970 -- 2011

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Fast mask writers: technology options and considerations (Invited Paper) [7970-32]

Litt, L.C.|Groves, T.|Hughes, G.

Bellingham, Wash.; SPIE; c2011 -- Volume: 7970 -- 2011

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5
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Evaluation of maskless electron beam direct writing with double character projection apertures [7637-12]

Midoh, Y.; Terasaka, T.; Nakamae, K.

Proceedings of SPIE, the International Society for Optical Engineering.; Alternative lithographic technologies; San Jose, CA, 2010; Feb, 2010, 7637 0D -- Bellingham, Wash.; SPIE; c2010 -- 2010

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6
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A new releasing material and continuous nano-imprinting in mold replication for patterned media [7970-29]

Suzuki, K.|Kobayashi, H.|Sato, T.|Yamashita, H.|Watanabe, T.

Bellingham, Wash.; SPIE; c2011 -- Volume: 7970 -- 2011

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7
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Fast and large-field electron-beam exposure by CSEL [7970-61]

Kojima, A.|Ohta, T.|Ohyi, H.|Koshida, N.

Bellingham, Wash.; SPIE; c2011 -- Volume: 7970 -- 2011

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8
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Landslide detection and monitoring using remote sensing and spatial analysis in Taiwan [8181-32]

Tsai, F. et al.

Proceedings of SPIE, the International Society for Optical Engineering.; Earth resources and environmental remote sensing/ GIS applications; Prague, Czech Republic, 2011; Sep, 2011, 8181 0V -- Bellingham, Wash.; SPIE; 2011 Part: Part 8181; -- 2011

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9
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Approaches to rapid resist spreading on dispensing based UV-NIL [7970-27]

Usuki, K.|Wakamatsu, S.|Oomatsu, T.|Kodama, K.|Kodama, K.

Bellingham, Wash.; SPIE; c2011 -- Volume: 7970 -- 2011

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10
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X-ray backscatter imaging (Invited Paper) [6945-38]

Dinca, D.-C.; Schubert, J.R.; Callerame, J.

Proceedings of SPIE, the International Society for Optical Engineering.; Optics and photonics in global homeland security; Orlanda, FL, 2008; Mar, 2008, 6945 16 -- Bellingham, Wash.; SPIE; c2008 -- 2008

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