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In-situ Electrical Characterization of Nano-Interconnect Structure in FIB

Cha, D. D. et al.

Microscopy and microanalysis : the official journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada. VOL 11; SUPP/2, ; 2005, 818CD-819CD -- SPRINGER (pages 818CD-819CD) -- 2005

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by this Author/Contributor:

  1. Ai, Y.
  2. Kim, M.-J.
  3. Cha, D. D.
  4. Huang, J
  5. GnadeE, B.

on this subject:

  1. Mathematics

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