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Thermal Anemometer Using Micro-air-bridge Heater with Chip Scale Wind Tunnel

Yasaka, S. et al.

PROCEEDINGS OF THE SENSOR SYMPOSIUM ON SENSORS MICROMACHINES AND APPLIED SYSTEMS. VOL 22, ; 2005, 143-146 -- THE INSTITUTE OF ELECTRICAL ENGINEERS OF JAPAN (pages 143-146) -- 2005

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P-29 Micro Wind Tunnel Type Anemometer Using a Micro-Air-Bridge Heater

Yasaka, S. et al.

PROCEEDINGS OF THE SENSOR SYMPOSIUM ON SENSORS MICROMACHINES AND APPLIED SYSTEMS. VOL 21ST, ; 2004, 261-264 -- THE INSTITUTE OF ELECTRICAL ENGINEERS OF JAPAN (pages 261-264) -- 2004

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  1. Ito, K.  (1)
  2. Ito, T  (1)
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by this Author/Contributor:

  1. Kaneko, S.
  2. Yasaka, S.
  3. Kanno, Y.
  4. Aikyo, Y.
  5. Mitsuhashi, M.

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