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Microelectromechanical System (MEMS) Switch Test

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Design and Fabrication of a Strain-Powered Microelectromechanical System (MEMS) Switch

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Interfacing a Microelectromechanical System (MEMS) Sensor Array for Traumatic Brain Injury Detection with a Microcontroller

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Parametric Approach to Determining the Optimum Geometry for PZT MEMS Switches Intended for Digital Applications

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Optimization of PbTiO3 Seed Layers for PZT MEMS Actuators

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A Piezoelectric MEMS Microphone Based on Lead Zirconate Titanate (PZT) Thin Films

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