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Electromagnetic bistable microactuator fabricated on a single wafer

Xiaodan Miao, et al.

Micro & nano letters. Volume 7:Number 2 (2012, March 5th); pp 99-100 -- Institution of Engineering and Technology

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  1. Peihong Wang,
  2. Guifu Ding,
  3. Yi Huang,
  4. Xiaolin Zhao,
  5. Xuhan Dai,

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