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Combined optimization and hybrid scalar-vector diffraction method for grating topography parameters determination

Hansen, P. E. et al.

Materials science & engineering. B, Advanced functional solid-state materials.; Nanosciences and nanotechnologies; 5th International workshop on nanosciences and nanotechnologies; , 2009, 2009, 165-168 -- Elsevier; 2009 (pages 165-168) -- 2009

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