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Improving the accuracy of ellipsometers for multilayer film measurements using incident angle verification and retrieval [3635-07]

Wang, J. S. et al.

Proceedings of SPIE, the International Society for Optical Engineering.; Liquid crystal materials, devices, and applications; San Jose; CA, 1999; Jan, 1999, 48-57 -- SPIE; 1999 (pages 48-57) -- 1999

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