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Modeling of a Plasma Etcher for Charging Free Processing of Nanoscale Structures

Radmilovic-Radjenovic, M. et al.

MATERIALS RESEARCH FORUM; Yugoslav Materials Research Society:; Recent developments in advanced materials and processes; Herceg Novi, Serbia and Montenegro, 2005; Sep, 2006, 57-62 -- Zurich; [Great Britain]:; Trans Tech Publications Ltd,; c2006 (pages 57-62) -- 2006

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