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Investigation of Amorphous Silicon-Carbon Films Deposited by Filtered Vacuum Cathodic Arc

Zhang, P. et al.

Journal of metastable and nanocrystalline materials.; Science and Technology of Nanomaterials:; ICMAT 2003; Singapore, 2003; Dec, 2005, 351-354 -- Switzerland; UK:; Trans Tech,; 2005 (pages 351-354) -- 2005

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