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Optical-Property Profiling of SiO~2 Films Containing Si Nanocrystals Formed by Si^+ Implantation

Liu, Y. et al.

Journal of metastable and nanocrystalline materials.; Science and Technology of Nanomaterials:; ICMAT 2003; Singapore, 2003; Dec, 2005, 133-136 -- Switzerland; UK:; Trans Tech,; 2005 (pages 133-136) -- 2005

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