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Effect of annealing on the composition and structure of HfO~2 and nitrogen-incorporated HfO~2

Yeo, C. C. et al.

Thin solid films.; International conference on materials for advanced technologies; ICMAT 2003; Singapore, 2003; Dec, 2004, 90-95 -- Elsevier,; 2004 (pages 90-95) -- 2004

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