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Mobility Characterization of p-Type and n-Type Strained Si~1~-~x~-~yGe~xC~y/Si Epilayer Hall Devices

Peterson, J. J. et al.

Materials Research Society symposia proceedings.; III-V and IV-IV materials and processing challenges for highly integrated microelectronics and optoelectronics; Boston; MA, 1998; Nov, 1999, 293-298 -- Warrendale, PA; Materials Research Society; 1999 (pages 293-298) -- 1999

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