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Wet etching characteristics and surface morphology evaluation of MOCVD grown HfO~2 film

Balasubramanian, M. et al.

Thin solid films.; International conference on materials for advanced technologies; ICMAT 2003; Singapore, 2003; Dec, 2004, 101-105 -- Elsevier,; 2004 (pages 101-105) -- 2004

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