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Thin film type 248-nm bottom antireflective coatings [5039-105]

Enomoto, T. Nakayama, K. Mizusawa, K. Nakajima, Y. Yoon, S. Kim, Y.-H. Kim, Y.-H. Chung, H.-S. Chon, S. M.; Fedynyshyn, T. H.

Proceedings of SPIE, the International Society for Optical Engineering.; Advances in resist technology and processing; Santa Clara, CA, 2003; Feb, 2003, 910-919 -- SPIE; 2003 (pages 910-919) -- 2003

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