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Changes of electronic properties of AlGaN/GaN HEMTs by surface treatment

Pletschen, W. et al.

MRS proceedings. Issue 1736: (2015, January 36th) -- Materials Research Society in partnership with Cambridge University Press

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  • Title:
    Changes of electronic properties of AlGaN/GaN HEMTs by surface treatment
  • Author: Pletschen, W.;
    Linkohr, St.;
    Kirste, L.;
    Cimalla, V.;
    Müller, S.;
    Himmerlich, M.;
    Krischok, S.;
    Ambacher, O.;
    Kaplar, R.;
    Meneghesso, G.;
    Ozpineci, B.;
    Takeuchi, T.
  • Found In: MRS proceedings. Issue 1736: (2015, January 36th)
  • Journal Title: MRS proceedings
  • Subjects: Electrical engineering--Congresses; Materials science--Congresses; Materials--Research--Congresses; Physics--Congresses; Hall effect,--reactive ion etching,--electronic material; Dewey: 620.11
  • Rights: legaldeposit
  • Publication Details: Materials Research Society in partnership with Cambridge University Press
  • Abstract: ABSTRACT:

    The impact of device processing and plasma treatments at different plasma conditions on the electronic transport properties of GaN/AlGaN/GaN heterostructures was investigated as well as annealing in nitrogen atmosphere at 425°C. The electrical properties are characterized by Hall-effect measurements while electron spectroscopy and X-ray measurements are used to investigate changes in the surface chemical composition and in the layer structure, respectively. It is demonstrated that these layer structures are quite sensitive even to non-plasma based processing. Furthermore, treatments in SF6and N2based plasmas strongly affect the 2DEG properties of the heterostructure due to altering of the surface barrier accompanied by thinning of the layer structure. Depending on the layer structure and the plasma conditions used the electronic properties may be recovered by annealing.


  • Identifier: System Number: LDEAvdc_100068666780.0x000001; Journal ISSN: 0272-9172; 10.1557/opl.2014.937
  • Publication Date: 2015
  • Physical Description: Electronic
  • Shelfmark(s): ELD Digital store

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