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Optimization of COC hot embossing with soft PDMS tools [6465-32]

Zhou, K. et al.

Proceedings of SPIE, the International Society for Optical Engineering. VOL 6465, ; 2007, 64650R -- International Society for Optical Engineering; 1999 -- 2007

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  • Title:
    Optimization of COC hot embossing with soft PDMS tools [6465-32]
  • Author: Zhou, K.;
    Papautsky, I.;
    Wang, W.
  • Found In: Proceedings of SPIE, the International Society for Optical Engineering. VOL 6465, ; 2007, 64650R
  • Journal Title: Proceedings of SPIE, the International Society for Optical Engineering.
  • Subjects: Electrical and Electronic Engineering; Mechanical Engineering; Civil Engineering; LCC: Q41.R67; Dewey: 621.36
  • Publication Details: International Society for Optical Engineering; 1999
  • Language: English
  • Identifier: Journal ISSN: 0277-786X
  • Publication Date: 2007
  • Physical Description: Physical
  • Accrual Information: Annual
  • Shelfmark(s): 6823.100000
  • UIN: ETOCRN206365904

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