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Self-Calibration of Coupling Error for 3-DOF Displacement Measurement of Planar Working Stage Based on Two Planar Gratings

Liu, Y. M. et al.

Applied mechanics and materials -- Trans Tech Publications Ltd. -- Volume: 870 Issue:; (pages 135-140) -- 2017

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  • Title:
    Self-Calibration of Coupling Error for 3-DOF Displacement Measurement of Planar Working Stage Based on Two Planar Gratings
  • Author: Liu, Y. M.;
    Li, Z. L.;
    Du, D. H.;
    Yuan, M. Q.;
    Huang, J. Z.;
    Tan, J. B.
  • Found In: Applied mechanics and materials. Volume 870(2017); 2017; 135-140
  • Journal Title: Applied mechanics and materials
  • Rights: ETOC material - rights may apply
  • Publication Details: Trans Tech Publications Ltd.
  • Place Name: Measurement technology and intelligent instruments (International symposium)
  • Description: Measurement technology and intelligent instruments (International symposium):Taipei. Sep 2015
  • Identifier: ETOCCN602849841
    Journal ISSN: 1660-9336
  • Publication Date: 2017
  • Physical Description: Physical
  • Shelfmark(s): 1574.900000
  • UIN: ETOCCN602849841

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