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Improving the accuracy of ellipsometers for multilayer film measurements using incident angle verification and retrieval [3635-07]

Wang, J. S. et al.

Proceedings of SPIE, the International Society for Optical Engineering.; Liquid crystal materials, devices, and applications; San Jose; CA, 1999; Jan, 1999, 48-57 -- SPIE; 1999 (pages 48-57) -- 1999

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  • Title:
    Improving the accuracy of ellipsometers for multilayer film measurements using incident angle verification and retrieval [3635-07]
  • Author: Wang, J. S.;
    Lee, S. J. H.;
    Lee, C. K.;
    Shashidhar, R.
  • Found In: Proceedings of SPIE, the International Society for Optical Engineering.; Liquid crystal materials, devices, and applications; San Jose; CA, 1999; Jan, 1999, 48-57
  • Conference Title: Proceedings of SPIE, the International Society for Optical Engineering.
  • Subjects: liquid crystal materials; SPIE
  • Publication Details: SPIE; 1999
  • Language: English
  • Place Name: San Jose; CA
  • Identifier: Journal ISSN: 0277-786X
    Conference ISBN: 0819431060
  • Publication Date: 1999
  • Physical Description: Physical
  • Shelfmark(s): 6823.100000
  • UIN: ETOCCN029840390

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