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Patterning at the nanoscale: Atomic force microscopy and extreme ultraviolet interference lithography

Parisse, P. et al.

Materials science & engineering. B, Advanced functional solid-state materials.; Nanosciences and nanotechnologies; 5th International workshop on nanosciences and nanotechnologies; , 2009, 2009, 227-230 -- Elsevier; 2009 (pages 227-230) -- 2009

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